@article{oai:kutarr.kochi-tech.ac.jp:00001318,
 author = {百田, 佐多生 and 野尻, 洋一 and 浜川, 恒圭 and 濱口, 顕典},
 issue = {1},
 journal = {高知工科大学紀要},
 month = {Mar},
 pages = {72--75},
 title = {Applications of Highly Charged Ar Ion Beams to Ion Beam Lithography},
 volume = {2},
 year = {2005}
}