@article{oai:kutarr.kochi-tech.ac.jp:00000145,
 author = {百田, 佐多生},
 issue = {6},
 journal = {砥粒加工学会誌},
 month = {Jun},
 pages = {348--351},
 title = {多価イオンビームによる露光技術},
 volume = {53},
 year = {2009}
}