{"created":"2023-05-15T12:36:39.775372+00:00","id":1490,"links":{},"metadata":{"_buckets":{"deposit":"54d54851-a667-401a-b4d1-3a3a0265003c"},"_deposit":{"created_by":2,"id":"1490","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"1490"},"status":"published"},"_oai":{"id":"oai:kutarr.kochi-tech.ac.jp:00001490","sets":["28:36"]},"author_link":["4170","4168","4172","4165","4171","4167","4169","4173","4164","4166"],"item_7_alternative_title_21":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"3-Dimensional Fabrication in Nano-meter Scale by using Heavy Ion Beams"}]},"item_7_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2011-07-15","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1","bibliographicPageEnd":"94","bibliographicPageStart":"89","bibliographicVolumeNumber":"8","bibliographic_titles":[{"bibliographic_title":"高知工科大学紀要"}]}]},"item_7_description_4":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"重イオンビームは、それ自体が興味深い研究対象であると同時に、強力なツールでもある。特に1MeV以下の低エネルギー重イオンビームは、その照射効果を利用した加工･改質を行うためのツールとして半導体製造をはじめとする広い分野に応用されている。照射効果の一つであるスパッタリング現象は、表面の平滑化や薄膜形成に利用されてきた。この手法に物質との反応性に富む多価イオンを利用すると、加工･製造プロセスの効率化が期待できる。また、結晶材料にイオンビームを照射した場合、スパッタリングの初期過程で数nm~数十nmの隆起現象が確認されている。この現象は、ナノメートルサイズの3次元構造体を形成する新たな加工法の実現を示唆している。これらの加工手法を確立するためには、スパッタリングや隆起現象の基礎データに基づいて加工特性を評価する必要がある。本論文では、高知工科大学に建設した多価重イオンビーム照射装置を用いて行った、スパッタリングと隆起現象に関する研究を紹介する。","subitem_description_type":"Abstract"}]},"item_7_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"4169","nameIdentifierScheme":"WEKO"}],"names":[{"name":"MOMOTA, Sadao"}]},{"nameIdentifiers":[{"nameIdentifier":"4170","nameIdentifierScheme":"WEKO"}],"names":[{"name":"HIRAO, Takashi"}]},{"nameIdentifiers":[{"nameIdentifier":"4171","nameIdentifierScheme":"WEKO"}],"names":[{"name":"FURUTA, Mamoru"}]},{"nameIdentifiers":[{"nameIdentifier":"4172","nameIdentifierScheme":"WEKO"}],"names":[{"name":"KAWAHARAMURA, Toshiyuki"}]},{"nameIdentifiers":[{"nameIdentifier":"4173","nameIdentifierScheme":"WEKO"}],"names":[{"name":"TANIGUCHI, Jun"}]}]},"item_7_publisher_35":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"高知工科大学"}]},"item_7_source_id_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA11954573","subitem_source_identifier_type":"NCID"}]},"item_7_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1348-4842","subitem_source_identifier_type":"ISSN"}]},"item_7_version_type_18":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"百田, 佐多生"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"平尾, 孝"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"古田, 守"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"川原村, 敏幸"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"谷口, 淳"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-02-13"}],"displaytype":"detail","filename":"rb8_089-094.pdf","filesize":[{"value":"842.1 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"rb8_089-094.pdf","url":"https://kutarr.kochi-tech.ac.jp/record/1490/files/rb8_089-094.pdf"},"version_id":"2a0b7911-bf8e-4c56-90d5-3b1cc4e1d6e2"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"重イオンビームを用いたナノメートルサイズの３次元加工","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"重イオンビームを用いたナノメートルサイズの３次元加工"}]},"item_type_id":"7","owner":"2","path":["36"],"pubdate":{"attribute_name":"公開日","attribute_value":"2011-07-29"},"publish_date":"2011-07-29","publish_status":"0","recid":"1490","relation_version_is_last":true,"title":["重イオンビームを用いたナノメートルサイズの３次元加工"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-15T14:04:42.228632+00:00"}