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  1. 学術雑誌論文

Change of hydrogen concentration after ion beam irradiation on polyimide films with 100–400 °C annealing

http://hdl.handle.net/10173/278
http://hdl.handle.net/10173/278
568ec9d4-8854-44aa-84ba-38d2fc9f3cd2
名前 / ファイル ライセンス アクション
A_nimb_249_1-2_158.pdf A_nimb_249_1-2_158.pdf (191.3 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2007-11-13
タイトル
タイトル Change of hydrogen concentration after ion beam irradiation on polyimide films with 100–400 °C annealing
言語
言語 eng
キーワード
主題Scheme Other
主題 ERDA
キーワード
主題Scheme Other
主題 RBS
キーワード
主題Scheme Other
主題 Kapton
キーワード
主題Scheme Other
主題 Polyimide
キーワード
主題Scheme Other
主題 Irradiation damage
キーワード
主題Scheme Other
主題 Hydrogen detection
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
著者 Watamori, Michio

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Watamori, Michio

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抄録
内容記述タイプ Abstract
内容記述 Irradiation damage in the several thickness polyimide films induced by 2.0 MeV He ions has been evaluated by Rutherford backscattering (RBS) and elastic recoil detection (ERDA) methods. For the samples without annealing, gradual decrease of hydrogen content has been observed with the increase of ion dose. After 5 min annealing at 100 °C, a large amount of hydrogen atoms disappeared suddenly. Then small and continuous depletion of hydrogen content was also observed after ion beam irradiation. After 5 min annealing at 300 °C, hydrogen concentration has recovered for the 100 °C annealed film in the case of no ion beam irradiation. Initial depletion rate of hydrogen for annealing and change of hydrogen content for the successive ion beam irradiation was found to be dependent on the film thickness.
書誌情報 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

巻 249, 号 1-2, p. 158-161, 発行日 2006-08
ISSN
収録物識別子タイプ ISSN
収録物識別子 0168-583X
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA10529980@@@AA11535162
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 10.1016/j.nimb.2006.03.104
権利
権利情報 © 2006 Elsevier B.V.
権利(URI)
権利情報 http://www.elsevier.com/wps/find/journaldescription.cws_home/505674/description | http://www.elsevier.com/wps/find/journaldescription.cws_home/505674/description
著者版フラグ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
出版者
出版者 Elsevier BV
関係URI
識別子タイプ URI
関連識別子 http://www.sciencedirect.com/science/journal/0168583X
関連名称 http://www.sciencedirect.com/science/journal/0168583X
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