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Change of hydrogen concentration after ion beam irradiation on polyimide films with 100–400 °C annealing
http://hdl.handle.net/10173/278
http://hdl.handle.net/10173/278568ec9d4-8854-44aa-84ba-38d2fc9f3cd2
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
A_nimb_249_1-2_158.pdf (191.3 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2007-11-13 | |||||
| タイトル | ||||||
| タイトル | Change of hydrogen concentration after ion beam irradiation on polyimide films with 100–400 °C annealing | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | ERDA | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | RBS | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Kapton | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Polyimide | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Irradiation damage | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | Hydrogen detection | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
Watamori, Michio
× Watamori, Michio |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Irradiation damage in the several thickness polyimide films induced by 2.0 MeV He ions has been evaluated by Rutherford backscattering (RBS) and elastic recoil detection (ERDA) methods. For the samples without annealing, gradual decrease of hydrogen content has been observed with the increase of ion dose. After 5 min annealing at 100 °C, a large amount of hydrogen atoms disappeared suddenly. Then small and continuous depletion of hydrogen content was also observed after ion beam irradiation. After 5 min annealing at 300 °C, hydrogen concentration has recovered for the 100 °C annealed film in the case of no ion beam irradiation. Initial depletion rate of hydrogen for annealing and change of hydrogen content for the successive ion beam irradiation was found to be dependent on the film thickness. | |||||
| 書誌情報 |
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 巻 249, 号 1-2, p. 158-161, 発行日 2006-08 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0168-583X | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA10529980@@@AA11535162 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1016/j.nimb.2006.03.104 | |||||
| 権利 | ||||||
| 権利情報 | © 2006 Elsevier B.V. | |||||
| 権利（URI） | ||||||
| 権利情報 | http://www.elsevier.com/wps/find/journaldescription.cws_home/505674/description | http://www.elsevier.com/wps/find/journaldescription.cws_home/505674/description | |||||
| 著者版フラグ | ||||||
| 出版タイプ | AM | |||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
| 出版者 | ||||||
| 出版者 | Elsevier BV | |||||
| 関係URI | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://www.sciencedirect.com/science/journal/0168583X | |||||
| 関連名称 | http://www.sciencedirect.com/science/journal/0168583X | |||||
