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First operation of ECR ion source at Kochi University of Technology
http://hdl.handle.net/10173/611
http://hdl.handle.net/10173/61115411e12-b335-41b2-819c-6368d6235c55
名前 / ファイル | ライセンス | アクション |
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RSI_75_5_1497.pdf (239.8 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2010-12-28 | |||||
タイトル | ||||||
タイトル | First operation of ECR ion source at Kochi University of Technology | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ion sources | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | cyclotron resonance | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Momota, Sadao
× Momota, Sadao× Nojiri, Yoichi× Saihara, Miwako× Sakamoto, Asako× Hamagawa, Hisayoshi× Hamaguchi, Kensuke |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | To study nano-scale manufacturing using highly charged ion beams, a facility to produce and irradiate heavy ion beams has been installed at Kochi University of Technology (KUT). The facility includes an ECR ion source (ECRIS), a beam transport and analysis system, and an irradiation system. The first beam was extracted from ECRIS in January 2003. To evaluate the performance of ECRIS, the measurements of the current and mass spectrum of ion beams as a function of the voltage for the beam extraction and of the rf power have been carried out. It is concluded from the present results that the combined use of the ECRIS and acceleration system with the transport and analysis system build at KUT works normally. | |||||
書誌情報 |
Review of Scientific Instruments 巻 75, 号 5, p. 1497-1498, 発行日 2004-05-13 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0034-6748@@@1089-7623 | |||||
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収録物識別子タイプ | NCID | |||||
収録物識別子 | AA00817730@@@AA12442307 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1063/1.1690450 | |||||
権利 | ||||||
権利情報 | Copyright 2004 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Rev. Sci. Instrum. 75, 1497 (2004) and may be found at http://link.aip.org/link/?rsi/75/1497 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
出版者 | ||||||
出版者 | American Institute of Physics | |||||
関係URI | ||||||
識別子タイプ | URI | |||||
関連識別子 | http://link.aip.org/link/?rsi/75/1497 | |||||
関連名称 | http://link.aip.org/link/?rsi/75/1497 |