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多価イオンビームによる露光技術
http://hdl.handle.net/10173/748
http://hdl.handle.net/10173/748dd4b4cbe-1f3e-4f35-b529-3b9c41dfea64
名前 / ファイル | ライセンス | アクション |
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2011-10-31 | |||||
タイトル | ||||||
タイトル | 多価イオンビームによる露光技術 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | highly charged ion | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ion beam lithography | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | micro-nano fabrication | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
百田, 佐多生
× 百田, 佐多生 |
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著者別名 | ||||||
姓名 | MOMOTA, Sadao | |||||
書誌情報 |
砥粒加工学会誌 巻 53, 号 6, p. 348-351, 発行日 2009-06-01 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0914-2703 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN10192823 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
その他のタイトル | ||||||
その他のタイトル | Highly charged ion beams applied to exposure process | |||||
出版者 | ||||||
出版者 | 砥粒加工学会 |