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Effects of elastic stress introduced by a silicon nitride cap on solid-phase crystallization of amorphous silicon
http://hdl.handle.net/10173/797
http://hdl.handle.net/10173/7977262b622-6748-4752-b004-b2a0841ac066
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
JAP_86_002278.pdf (352.4 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2012-03-17 | |||||
| タイトル | ||||||
| タイトル | Effects of elastic stress introduced by a silicon nitride cap on solid-phase crystallization of amorphous silicon | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
Kimura, Yasuo
× Kimura, Yasuo× Kishi, Masato× Katoda, Takashi |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Effects of stress on solid-phase crystallization of amorphous silicon (a-Si) were studied by laser Raman spectroscopy. Compressive stress was introduced in a-Si with a Si3N4 cap. The speed of crystallization decreased with the increase of the stress while it increased again with an additional cap of SiO2 on a Si3N4 cap. A SiO2 cap introduced tensile stress in an a-Si film and relaxed compressive stress by a Si3N4 cap. The reason why crystallization of a-Si is suppressed is that the stress is elastic and that it does not relax with crystallization. | |||||
| 書誌情報 |
Journal of Applied Physics 巻 86, 号 4, p. 2278-2280, 発行日 1999-08-15 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0021-8979@@@1089-7550 | |||||
| 書誌レコードID | ||||||
| 収録物識別子タイプ | NCID | |||||
| 収録物識別子 | AA00693547@@@AA11868165 | |||||
| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1063/1.371042 | |||||
| 権利 | ||||||
| 権利情報 | Copyright 1999 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics 86, 002278 (1999) and may be found at http://link.aip.org/link/?jap/86/002278. |
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| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
