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  1. 学術雑誌論文

Analysis of a wafer bonded Ge/Si heterojunction by transmission electron microscopy

http://hdl.handle.net/10173/593
http://hdl.handle.net/10173/593
f3f632cc-d080-45ea-978e-f913f1e679ad
名前 / ファイル ライセンス アクション
APL_91_14_142119.pdf APL_91_14_142119.pdf (349.6 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2010-11-22
タイトル
タイトル Analysis of a wafer bonded Ge/Si heterojunction by transmission electron microscopy
言語
言語 eng
キーワード
主題Scheme Other
主題 crystal defects
キーワード
主題Scheme Other
主題 elemental semiconductors,
キーワード
主題Scheme Other
主題 germanium, lattice constants
キーワード
主題Scheme Other
主題 photodetectors
キーワード
主題Scheme Other
主題 photodiodes
キーワード
主題Scheme Other
主題 semiconductor heterojunctions
キーワード
主題Scheme Other
主題 silicon
キーワード
主題Scheme Other
主題 transmission electron microscopy
キーワード
主題Scheme Other
主題 wafer bonding
キーワード
主題Scheme Other
主題 X-ray chemical analysis
キーワード
主題Scheme Other
主題 X-ray crystallography
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
著者 Kanbe, Hiroshi

× Kanbe, Hiroshi

WEKO 271

Kanbe, Hiroshi

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Miyaji, Masayuki

× Miyaji, Masayuki

WEKO 272

Miyaji, Masayuki

Search repository
Hirose, Mami

× Hirose, Mami

WEKO 273

Hirose, Mami

Search repository
Nitta, Noriko

× Nitta, Noriko

WEKO 274

Nitta, Noriko

Search repository
Taniwaki, Masafumi

× Taniwaki, Masafumi

WEKO 275

Taniwaki, Masafumi

Search repository
抄録
内容記述タイプ Abstract
内容記述 A wafer-bonded Ge/Si heterojunction was observed using transmission electron microscopy to analyze its crystallographic properties and to reveal atomic profiles at the interface by energy dispersive x-ray spectroscopy. There was a 2 nm thick transition layer at the heterojunction, where an aligned lattice image from Si to Ge together with a disordered lattice image could be observed. In the Si layer close to the interface, islandlike modified regions were observed to exist, where a large amount of Ge was detected. Oxygen was also detected accumulated at the interface.
書誌情報 Applied Physics Letters

巻 91, 号 14, p. 142119-1-142119-3, 発行日 2007-10-04
ISSN
収録物識別子タイプ ISSN
収録物識別子 0003-6951
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA00543431
DOI
関連タイプ isIdenticalTo
識別子タイプ DOI
関連識別子 10.1063/1.2795797
権利
権利情報 Copyright 2007 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Appl. Phys. Lett. 91, 142119 (2007) and may be found at http://link.aip.org/link/?apl/91/142119
著者版フラグ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
出版者
出版者 American Institute of Physics
関係URI
識別子タイプ URI
関連識別子 http://link.aip.org/link/?apl/91/142119
関連名称 http://link.aip.org/link/?apl/91/142119
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