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  1. 学術雑誌論文

集束イオンビーム照射と化学エッチングを併用した3次元微細構造形成(微細構造形成の高能率化)

http://hdl.handle.net/10173/597
http://hdl.handle.net/10173/597
f8bb7b74-9061-4d7c-845a-3e0f8346d745
名前 / ファイル ライセンス アクション
JSMEC_74_748_3056.pdf JSMEC_74_748_3056.pdf (1.6 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2010-12-11
タイトル
タイトル 集束イオンビーム照射と化学エッチングを併用した3次元微細構造形成(微細構造形成の高能率化)
言語
言語 jpn
キーワード
主題Scheme Other
主題 Focused Ion Beam
キーワード
主題Scheme Other
主題 Wet Chemical Etching
キーワード
主題Scheme Other
主題 Maskless Patterning
キーワード
主題Scheme Other
主題 Three-Dimensional Microfabrication
キーワード
主題Scheme Other
主題 Single Crystal Silicon
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
著者 川堰, 宣隆

× 川堰, 宣隆

WEKO 283

川堰, 宣隆

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深瀬, 達也

× 深瀬, 達也

WEKO 284

深瀬, 達也

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森田, 昇

× 森田, 昇

WEKO 285

森田, 昇

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芦田, 極

× 芦田, 極

WEKO 286

芦田, 極

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谷口, 淳

× 谷口, 淳

WEKO 287

谷口, 淳

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宮本, 岩男

× 宮本, 岩男

WEKO 288

宮本, 岩男

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百田, 佐多生

× 百田, 佐多生

WEKO 289

百田, 佐多生

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抄録
内容記述タイプ Abstract
内容記述 This study aims to fabricate three−dimensional microstructures on a silicon surface using focused ion beam (FIB) irradiation and wet chemical etching. A silicon surface irradiated with FIB withstands etching in KOH, and consequently protruding structures can be fabricated on the irradiated area. Three−dimensional fabrication is possible by taking advantage of the change in the etch stop effect due to irradiation conditions. To fabricate higher structures efficiently, height dependences on various fabrication conditions were nvestigated. As a result, the height of the structures can be controlled by ion dose, in spite of the higher dose condition. A hard−to−etch mask was formed by preventing the channeling effect. Higher structures were fabricated with shorter etch time at the high−temperature conditions. Etching selectivity increased at high dose and low etchant concentration. These results enable us to fabricate higher structures efficiently.
書誌情報 日本機械学會論文集. C編 = Transactions of the Japan Society of Mechanical Engineers. C

巻 74, 号 748, p. 3056-3062, 発行日 2008-12
ISSN
収録物識別子タイプ ISSN
収録物識別子 0387-5024
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AN00187463
権利
権利情報 社団法人日本機械学会
著者版フラグ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
その他のタイトル
その他のタイトル Three−Dimensional Microfabrication Using Focused Ion Beam
出版者
出版者 日本機械学会
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