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  1. 学術雑誌論文

Electrical Properties of the Thin-Film Transistor With an Indium–Gallium–Zinc Oxide Channel and an Aluminium Oxide Gate Dielectric Stack Formed by Solution-Based Atmospheric Pressure Deposition

http://hdl.handle.net/10173/970
http://hdl.handle.net/10173/970
5f37e1fb-3752-4314-8045-787c65ff45b8
名前 / ファイル ライセンス アクション
IEEE_EDL_33_6_851.pdf IEEE_EDL_33_6_851.pdf (402.2 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2013-03-29
タイトル
タイトル Electrical Properties of the Thin-Film Transistor With an Indium–Gallium–Zinc Oxide Channel and an Aluminium Oxide Gate Dielectric Stack Formed by Solution-Based Atmospheric Pressure Deposition
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
著者 Furuta, Mamoru

× Furuta, Mamoru

Furuta, Mamoru

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Kawaharamura, Toshiyuki

× Kawaharamura, Toshiyuki

Kawaharamura, Toshiyuki

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Wang, Depang

× Wang, Depang

Wang, Depang

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Toda, Tatsuya

× Toda, Tatsuya

Toda, Tatsuya

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Hirao, Takashi

× Hirao, Takashi

Hirao, Takashi

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抄録
内容記述タイプ Abstract
内容記述 We developed a thin-film transistor (TFT) with an amorphous-indium-gallium-zinc oxide (IGZO) channel and aluminium oxide (AlO_x) gate dielectric stack that was formed using a solution-based atmospheric pressure chemical vapor deposition. A breakdown electric field of 5.9 MV/cm and a dielectric constant of 6.8 were achieved for the AlO_x gate dielectric. The nonvacuum-processed IGZO TFT gave a field-effect mobility of 4.2 cm^2 ・ V^<-1> ・ s^<-1> and an on/off current ratio of over 10^8. Moreover, the proposed deposition method is a powerful tool for material research to explore multicomponent oxide insulators and semiconductors.
書誌情報 IEEE Electron Device Letters

巻 33, 号 6, p. 851-853, 発行日 2012-06
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 10.1109/LED.2012.2192902
権利
権利情報 © 20xx IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creatin
著者版フラグ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
出版者
出版者 IEEE
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