{"_buckets": {"deposit": "5e578706-13ab-40d4-b9ef-2b0b08cb893e"}, "_deposit": {"created_by": 2, "id": "240", "owners": [2], "pid": {"revision_id": 0, "type": "depid", "value": "240"}, "status": "published"}, "_oai": {"id": "oai:kutarr.kochi-tech.ac.jp:00000240", "sets": ["5"]}, "author_link": ["992", "996", "997", "993", "995", "994"], "item_2_biblio_info_7": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2012-07-01", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "20", "bibliographicPageStart": "17", "bibliographicVolumeNumber": "282", "bibliographic_titles": [{"bibliographic_title": "Nuclear Instruments and Methods in Physics Research B"}]}]}, "item_2_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "The swelling phenomenon of Si crystal, irradiated by Ar^+ and C^+ beams, and its morphological change through the thermal annealing process have been studied. The height of swelling structures produced by the Ar^+ beam is much higher than that produced by the C^+ beam at energy 90 keV with the fluence up to 8 × 10^\u003c16\u003e/cm^2. The large different in the swelling height was well understood base on the productivity of vacancies evaluated by the SRIM simulation and experiment. Post-implantation samples irradiated with fluence 4 × 10^\u003c16\u003e/cm^2, were annealed at various temperatures in the range of 200 ～ 800 ℃. In the case of Ar^+ irradiated samples, the swelling height started to increase at about 600 ℃. In contrast, in the case of C^+ beam irradiated samples, the swelling height started to decrease at about 600 ℃ and almost disappeared at 800 ℃. The opposite behavior is understood based on the difference in irradiation-induced defect and in rearrangement mechanism in the thermal annealing process.", "subitem_description_type": "Abstract"}]}, "item_2_publisher_35": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "Elsevier B.V."}]}, "item_2_relation_13": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isVersionOf", "subitem_relation_type_id": {"subitem_relation_type_id_text": "10.1016/j.nimb.2011.08.027", "subitem_relation_type_select": "DOI"}}]}, "item_2_version_type_18": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_ab4af688f83e57aa", "subitem_version_type": "AM"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Zhang, J."}], "nameIdentifiers": [{"nameIdentifier": "992", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Momota, S."}], "nameIdentifiers": [{"nameIdentifier": "993", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Toyonaga, T."}], "nameIdentifiers": [{"nameIdentifier": "994", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Terauchi, H."}], "nameIdentifiers": [{"nameIdentifier": "995", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Imanishi, F."}], "nameIdentifiers": [{"nameIdentifier": "996", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Taniguchi, J."}], "nameIdentifiers": [{"nameIdentifier": "997", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2019-02-13"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "27-48.pdf", "filesize": [{"value": "860.7 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 860700.0, "url": {"label": "27-48.pdf", "url": "https://kutarr.kochi-tech.ac.jp/record/240/files/27-48.pdf"}, "version_id": "6475cfd1-cd65-4e66-8bd6-7637f6592d69"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Swelling and annealing phenomena of Si crystal irradiated by Ar and C ion beams", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Swelling and annealing phenomena of Si crystal irradiated by Ar and C ion beams"}]}, "item_type_id": "2", "owner": "2", "path": ["5"], "permalink_uri": "http://hdl.handle.net/10173/1362", "pubdate": {"attribute_name": "公開日", "attribute_value": "2016-03-25"}, "publish_date": "2016-03-25", "publish_status": "0", "recid": "240", "relation": {}, "relation_version_is_last": true, "title": ["Swelling and annealing phenomena of Si crystal irradiated by Ar and C ion beams"], "weko_shared_id": -1}