ログイン
言語:

WEKO3

  • トップ
  • ランキング
To
lat lon distance
To

Field does not validate



インデックスリンク

インデックスツリー

メールアドレスを入力してください。

WEKO

One fine body…

WEKO

One fine body…

アイテム

  1. 学術雑誌論文

Swelling and annealing phenomena of Si crystal irradiated by Ar and C ion beams

http://hdl.handle.net/10173/1362
http://hdl.handle.net/10173/1362
faa06a4b-4a76-46e2-b860-9fdb08f81e6f
名前 / ファイル ライセンス アクション
27-48.pdf 27-48.pdf (860.7 kB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2016-03-25
タイトル
タイトル Swelling and annealing phenomena of Si crystal irradiated by Ar and C ion beams
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
著者 Zhang, J.

× Zhang, J.

Zhang, J.

Search repository
Momota, S.

× Momota, S.

Momota, S.

Search repository
Toyonaga, T.

× Toyonaga, T.

Toyonaga, T.

Search repository
Terauchi, H.

× Terauchi, H.

Terauchi, H.

Search repository
Imanishi, F.

× Imanishi, F.

Imanishi, F.

Search repository
Taniguchi, J.

× Taniguchi, J.

Taniguchi, J.

Search repository
抄録
内容記述タイプ Abstract
内容記述 The swelling phenomenon of Si crystal, irradiated by Ar^+ and C^+ beams, and its morphological change through the thermal annealing process have been studied. The height of swelling structures produced by the Ar^+ beam is much higher than that produced by the C^+ beam at energy 90 keV with the fluence up to 8 × 10^<16>/cm^2. The large different in the swelling height was well understood base on the productivity of vacancies evaluated by the SRIM simulation and experiment. Post-implantation samples irradiated with fluence 4 × 10^<16>/cm^2, were annealed at various temperatures in the range of 200 ~ 800 ℃. In the case of Ar^+ irradiated samples, the swelling height started to increase at about 600 ℃. In contrast, in the case of C^+ beam irradiated samples, the swelling height started to decrease at about 600 ℃ and almost disappeared at 800 ℃. The opposite behavior is understood based on the difference in irradiation-induced defect and in rearrangement mechanism in the thermal annealing process.
書誌情報 Nuclear Instruments and Methods in Physics Research B

巻 282, p. 17-20, 発行日 2012-07-01
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 10.1016/j.nimb.2011.08.027
著者版フラグ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
出版者
出版者 Elsevier B.V.
戻る
0
views
See details
Views

Versions

Ver.1 2023-05-15 13:40:44.449664
Show All versions

Share

Mendeley Twitter Facebook Print Addthis

Cite as

エクスポート

OAI-PMH
  • OAI-PMH JPCOAR 2.0
  • OAI-PMH JPCOAR 1.0
  • OAI-PMH DublinCore
  • OAI-PMH DDI
Other Formats
  • JSON
  • BIBTEX

Confirm


Powered by WEKO3


Powered by WEKO3