{"_buckets": {"deposit": "28962559-e52f-404c-b6ab-c8b34467b74d"}, "_deposit": {"created_by": 2, "id": "257", "owners": [2], "pid": {"revision_id": 0, "type": "depid", "value": "257"}, "status": "published"}, "_oai": {"id": "oai:kutarr.kochi-tech.ac.jp:00000257", "sets": ["5"]}, "author_link": ["1059", "1057", "1060", "1058", "1056"], "item_2_biblio_info_7": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2011", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "5", "bibliographicPageEnd": "051205-4", "bibliographicPageStart": "051205-1", "bibliographicVolumeNumber": "29", "bibliographic_titles": [{"bibliographic_title": "Journal of Vacuum Science and Technology B"}]}]}, "item_2_description_4": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Zn_\u003c1−x\u003e Mg_x O thin films were deposited onto quartz glass substrates using a radio frequency magnetron sputtering at various depositionpressures. It was found that the Mg concentration in the Zn_\u003c1−x\u003e Mg_xO thin films significantly increased by decreasing the depositionpressure from 9 to 1 Pa, which contributed to an increase in the band gap of the ZnMgO films. In addition, the Zn_\u003c1−x\u003e Mg_xO thin films, which had a hexagonal wurtzite structure when obtained by high pressure deposition (7 and 9 Pa) at x ≤ 0.478, had a cubic rock-salt crystal structure when deposition pressure was decreased to 1-5 Pa at x ≥ 0.482. These results show that the band gap of the ZnMgO thin films could be easily modulated only by adjusting of the deposition pressure during the radio frequency sputtering process.", "subitem_description_type": "Abstract"}]}, "item_2_publisher_35": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "American Institute of Physics"}]}, "item_2_relation_13": {"attribute_name": "DOI", "attribute_value_mlt": [{"subitem_relation_type": "isIdenticalTo", "subitem_relation_type_id": {"subitem_relation_type_id_text": "10.1116/1.3622316", "subitem_relation_type_select": "DOI"}}]}, "item_2_rights_14": {"attribute_name": "権利", "attribute_value_mlt": [{"subitem_rights": "© 2011 American Vacuum Society"}, {"subitem_rights": "American Institute of Physics,  Dapeng Wang, Tadashi Narusawa, Toshiyuki Kawaharamura, Mamoru Furuta and Chaoyang Li, Journal of Vacuum Science and Technology B, 29(5), 2011, p051205-1-4"}]}, "item_2_rights_15": {"attribute_name": "権利（URI）", "attribute_value_mlt": [{"subitem_rights": "http://scitation.aip.org/content/avs/journal/jvstb/29/5/10.1116/1.3622316 | http://scitation.aip.org/content/avs/journal/jvstb/29/5/10.1116/1.3622316"}]}, "item_2_version_type_18": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "Wang, Dapeng"}], "nameIdentifiers": [{"nameIdentifier": "1056", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Narusawa, Tadashi"}], "nameIdentifiers": [{"nameIdentifier": "1057", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Kawaharamura, Toshiyuki"}], "nameIdentifiers": [{"nameIdentifier": "1058", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Furuta, Mamoru"}], "nameIdentifiers": [{"nameIdentifier": "1059", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Li, Chaoyang"}], "nameIdentifiers": [{"nameIdentifier": "1060", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2019-02-13"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "27-34.pdf", "filesize": [{"value": "597.0 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 597000.0, "url": {"label": "27-34.pdf", "url": "https://kutarr.kochi-tech.ac.jp/record/257/files/27-34.pdf"}, "version_id": "0fd22304-eae4-49d5-b028-194f324e0669"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "journal article", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "Influence of sputtering pressure on band gap of Zn_\u003c1−x\u003eMg_xO thin films prepared by radio frequency magnetron sputtering", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Influence of sputtering pressure on band gap of Zn_\u003c1−x\u003eMg_xO thin films prepared by radio frequency magnetron sputtering"}]}, "item_type_id": "2", "owner": "2", "path": ["5"], "permalink_uri": "http://hdl.handle.net/10173/1379", "pubdate": {"attribute_name": "公開日", "attribute_value": "2016-03-25"}, "publish_date": "2016-03-25", "publish_status": "0", "recid": "257", "relation": {}, "relation_version_is_last": true, "title": ["Influence of sputtering pressure on band gap of Zn_\u003c1−x\u003eMg_xO thin films prepared by radio frequency magnetron sputtering"], "weko_shared_id": -1}