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Influence of sputtering pressure on band gap of Zn_<1−x>Mg_xO thin films prepared by radio frequency magnetron sputtering
http://hdl.handle.net/10173/1379
http://hdl.handle.net/10173/13798cd91c90-c1bb-47ef-9129-1bf476b60f92
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
27-34.pdf (597.0 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2016-03-25 | |||||
| タイトル | ||||||
| タイトル | Influence of sputtering pressure on band gap of Zn_<1−x>Mg_xO thin films prepared by radio frequency magnetron sputtering | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
Wang, Dapeng
× Wang, Dapeng× Narusawa, Tadashi× Kawaharamura, Toshiyuki× Furuta, Mamoru× Li, Chaoyang |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Zn_<1−x> Mg_x O thin films were deposited onto quartz glass substrates using a radio frequency magnetron sputtering at various depositionpressures. It was found that the Mg concentration in the Zn_<1−x> Mg_xO thin films significantly increased by decreasing the depositionpressure from 9 to 1 Pa, which contributed to an increase in the band gap of the ZnMgO films. In addition, the Zn_<1−x> Mg_xO thin films, which had a hexagonal wurtzite structure when obtained by high pressure deposition (7 and 9 Pa) at x ≤ 0.478, had a cubic rock-salt crystal structure when deposition pressure was decreased to 1-5 Pa at x ≥ 0.482. These results show that the band gap of the ZnMgO thin films could be easily modulated only by adjusting of the deposition pressure during the radio frequency sputtering process. | |||||
| 書誌情報 |
Journal of Vacuum Science and Technology B 巻 29, 号 5, p. 051205-1-051205-4, 発行日 2011 |
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| DOI | ||||||
| 関連タイプ | isIdenticalTo | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1116/1.3622316 | |||||
| 権利 | ||||||
| 権利情報 | © 2011 American Vacuum Society | |||||
| 権利 | ||||||
| 権利情報 | American Institute of Physics, Dapeng Wang, Tadashi Narusawa, Toshiyuki Kawaharamura, Mamoru Furuta and Chaoyang Li, Journal of Vacuum Science and Technology B, 29(5), 2011, p051205-1-4 | |||||
| 権利（URI） | ||||||
| 権利情報 | http://scitation.aip.org/content/avs/journal/jvstb/29/5/10.1116/1.3622316 | http://scitation.aip.org/content/avs/journal/jvstb/29/5/10.1116/1.3622316 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
| 出版者 | ||||||
| 出版者 | American Institute of Physics | |||||
